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Extreme ultraviolet lithography
Results: 188

#	Item
141	SIMULATING LASER PULSE PROPAGATION UNDER OPTIMIZED CONDITIONS FOR HIGH-HARMONIC GENERATION by Matthew D. Turner Add to Reading List Source URL: staff.washington.edu Language: English - Date: 2007-10-04 18:13:39 Physics Laser science High Harmonic Generation Extreme ultraviolet lithography Extreme ultraviolet Self-focusing Laser Kerr effect Plasma Optics Nonlinear optics Electromagnetic radiation
142	A DECADE OF SOLID STATE PULSED POWER DEVELOPMENT AT CYMER INC. R. Ness, P. Melcher, G. Ferguson, and C. Huang Cymer Inc., 17075 Thornmint Court, San Diego, CA 92127, USA Abstract Add to Reading List Source URL: www.nessengr.com Language: English - Date: 2008-11-08 13:32:49 Power electronics Pulsed power Power supply Capacitor Extreme ultraviolet lithography Transformer Insulated gate bipolar transistor Electronic test equipment Radio electronics Electrical engineering Electromagnetism Technology
143	Proposed list of topics for the workshop[removed]nm plasma sources to support high volume manufacturing (HVM) scanners Update on performance of high power EUV Sources Approaches to power scaling to enable 500 W - 1 kW E Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-08-14 22:44:49 Extreme ultraviolet lithography Extreme ultraviolet Ultraviolet
144	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-06-04 20:27:31 Extreme ultraviolet lithography Extreme ultraviolet Photomask
145	List of Leading EUVL Technical Challenges 2014 International Workshop on EUVL Makena Beach, Maui, Hawaii, June 23-37, 2014 Source Power scaling of Sn LPP sources to 250 W Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-02-06 23:29:18 Resist Ultraviolet Electromagnetism Physics Photomask Extreme ultraviolet lithography Multiple patterning Extreme ultraviolet
146	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-02-17 11:10:35 Laboratory for Energy Conversion Technology Physics Extreme ultraviolet lithography Extreme ultraviolet Institute for Spectroscopy Russian Academy of Sciences
147	First Call for Papers This leading annual workshop focuses on the latest technical developments related to extreme ultraviolet (EUV) and soft X-ray sources. Papers on the generation of photons in this wavelength region u Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-08-14 22:44:22 Knowledge Plasma physics Extreme ultraviolet X-ray astronomy Abstract Ultraviolet Laser Electromagnetic radiation Extreme ultraviolet lithography Physics
148	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2013-11-17 22:16:41 Institute for Spectroscopy Russian Academy of Sciences 11 nanometer Extreme ultraviolet lithography Extreme ultraviolet University College Dublin
149	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-05-29 18:34:58 Wailea Hawaii PM Maui Hawaii Geography of the United States Extreme ultraviolet lithography Extreme ultraviolet Makena State Park
150	2014 International Workshop on EUV Lithography Makena Beach & Golf Resort, Maui, Hawaii June 23-27, 2014 FIRST CALL FOR PAPERS We are inviting presentations and poster papers for the 2014 International Workshop on EUV Li Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-03-07 16:40:53 Multiple patterning Visual arts Extreme ultraviolet Abstract management Abstract Lithography Makena State Park Extreme ultraviolet lithography Knowledge Electromagnetic radiation

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